MicroDoer™ PFA series pleated filter cartridges are constructed of 100% fluoropolymer membrane and hardware for ultimate performance in the most demanding microelectronics applications.
They deliver extraordinary chemical comp...
MicroDoer PFA series pleated filter cartridges are constructed of 100% fluoropolymer membrane and hardware for ultimate performance in the most demanding microelectronics applications. They deliver extraordinary chemical compatibility, heat tolerance, and filter cleanliness. Available in an industry-leading effective filtration area of 1.12sqm (12.1sqft). Product purity is assured with proven ultra-low extractable TOC and ionic substances. Cartridges are 100% integrity tested to assure optimized retention performance.
Features
100% fluoropolymer, with PTFE membrane and PFA hardware.
Ultimate chemical compatibility and heat tolerance.
Optional proprietary acid treatment and standard extended duration 18 mega-ohm rinse assures lowest degree of extractable substances.
Available in a hydrophilic membrane option for ease of wetting in aqueous uses.
Applications
Aggressive wet-etch solutions
Concentrated acids and caustics
Oxidizers; ozonated solutions
Fine chemical filtration
Ultra-pure process water production
Plating solutions
Product Quality
Each membrane filter element is individually tested for integrity by diffusion flow.
Individual elements are tracked by serial number.
Produced in a Class 10,000 clean-room environment for product purity & cleanliness.
Manufactured within an ISO 9001:2015 certified quality management system.
Certificate of Quality document is provided with each production lot.
Materials of Construction
Media
PTFE
Support Layers
PTFE
Cage/Core/End Caps
PFA (polyfluoroalkyl)
Seal Options
E-FKM
Dimensions
Diameter
69mm (2.72")
Lengths
10”, 20”, 30”, 40”
Filtration Area
1.12 m² (12.1ft²) per 10” element
Operating Conditions
Operating Temperature
185°C (365°F) max.
Operating dP (max.)
4 bar (58 psi) @ 20°C (68°F),2 bar (29 psi) @ 80°C (176°F)
Change-Out dP
2.6 bar (38 psi) @ 20°C (68°F)
Clean Pressure Drop
Effluent Quality
Particulate Release
≤ 2 /ml at ≥0.2μ ≤ 1 /ml at ≥0.5μ
TOC
non-detectable
ionic metals
<15 ppb
*Data for "SCH" high-performance semi-conductor rinse option
